Localized surface plasmon nanolithography with ultrahigh resolution
نویسندگان
چکیده
منابع مشابه
Surface plasmon interference nanolithography.
A new nanophotolithography technique based on the interference of surface plasmon waves is proposed and demonstrated by using computer simulations. The wavelengths of the surface plasmon waves at metal and dielectric interfaces can reach the nanometer scale while their frequencies remain in the optical range. As a result, the resolution of this surface plasmon interference nanolithography (SPIN...
متن کاملNumerical simulation of surface-plasmon-assisted nanolithography.
In this paper, based on numerical study using Finite Difference Time Domain method, we discuss two possible illumination schemes utilizing surface plasmon effects to achieve high density sub-100 nm scale photolithography by using ultraviolet light from a mercury lamp. In the illumination schemes discussed in this paper, a thin film layer, named as shield layer, is placed in between a photoresis...
متن کاملDeep subwavelength nanolithography using localized surface plasmon modes on planar silver mask
Articles you may be interested in Simulation study of cleaning induced extreme ultraviolet reflectivity loss mechanisms on mask blanks
متن کاملProgrammable nanolithography with plasmon nanoparticle arrays.
We describe how optical contact lithography based on plasmon particle array masks allows generation of a large number of different subwavelength exposure patterns using a single mask. Within an exact point dipole model, we study the local response of silver particles in small two-dimensional arrays with 50-200 nm spacing. We show how illumination with unfocused light allows optically addressing...
متن کاملDirect imaging of localized surface plasmon polaritons.
In this Letter, we report on dark field imaging of localized surface plasmon polaritons (SPPs) in plasmonic waveguiding bands formed by plasmonic coupled cavities. We image the light scattered from SPPs in the plasmonic cavities excited by a tunable light source. Tuning the excitation wavelength, we measure the localization and dispersion of the plasmonic cavity mode. Dark field imaging has bee...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2007
ISSN: 1094-4087
DOI: 10.1364/oe.15.014177